Turbo-gepumpter Sputter- und Carbon-Coater - EMS150V Plus Series

Die EMS150V Plus Serie ist je nach gewählter Ausstattung, als turbo-gepumpter Sputter-Coater für oxidierende Metalle zum ultra-hochauflösenden Imaging, zur Kohlebedampfung von ultrafeinen Carbon-Filmen z.B. zur TEM Grid-Beschichtung oder für beide Applikationen geeignet. Vorvakuumpumpe nicht enthalten.

Artikel für gruppiertes Produkt
Artikelname	Menge
Turbo-gepumpter Sputter-Coater, EMS150V S Plus E5700
Turbo-gepumpter Carbon Coater, EMS150V E Plus E5710
Turbo-gepumpter Sputter- und Carbon-Coater, EMS150V ES Plus E5720

Produktdetails

Beschreibung

The EMS 150V Plus product line is a compact turbomolecular-pumped coating system suitable for Ultra-high resolution SEM and ultra thin-film applications.

The EMS150V Plus product line is available in three formats:

A ultra-high resolution sputter coater, suitable for oxidizing metals with ultra-fine grian size(EMS150V S Plus)
A ultra-high vacuum carbon coater for TEM applications, e.g. TEM grid coating (EMS150V E Plus)
A ultra-high resolution sputter coater and ultra-high vacuum carbon evaporator (EMS150V ES Plus). The deposition head inserts can be swapped in
seconds.

Key Features

Touchscreen control – fully automatic, rapid data input, simple operation
Multiple, customer defined coating schedules can be stored – ideal for multi-user labs
Automatic vacuum control, which can be preprogrammed to suit the process and material – no manual needle valve to adjust
Easy-to-change, drop-in style specimen stages (rotation stage as standard)
For sputtering of a wide range of oxidizing and non-oxidizing metals – suitable for ultra-high resolution SEM andmany ultra-thin film applications
Ultra-fine grain sputtering – for advanced high resolution FE-SEM applications
Vacuum shutdown feature – leaves the process chamber under vacuum when not in use – improved vacuum performance
Pump hold – allows the system to be held in continuous pumping mode, awaiting user input before continuing the process
Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
Ethernet with local FTP server connection – simple programmer updates
Three-year warranty

Processes

Sputtering: 0-150mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without 'breaking' vacuum and with built in rest periods).

Optional accessories for the EMS150V Plus Series:

Glow discharge (0-80mA operates in DC+ and DC- modes) – for modification of sample surface properties (e.g. hydrophobic to hydrophilic conversion) or for cleaning/removal of contaminating surface residues
Carbon cord evaporation (optional)
Film thickness monitor (FTM) - Precise thickness control
Metal evaporation and aperture cleaning insert – for thermal evaporation of metals from filaments or boats and cleaning of SEM or TEM apertures.

<< For detailed information see datasheet >>

Specifications

Display	115.5mm W x 86.4mm H, 640x480 RGB Touchscreen
Work chamber	Borosilicate Glass: 150mm ID x 127mm H
Specimen stage	50mm Ø rotating stage. Rotation speed 8-20 rpm
User interface	Intuitive full graphical interface with touchscreen buttons, includes features such as reminders for maintenance and a log of the last 1000 coatings.
Sputter target	Disc style 57mm Ø, 0.3mm thick. Chromium target is fitted as standard. V S and V ES versions only
Safety shield	Integral polyethylene terephthalate (PET) cylinder
Typical ultimate vacuum	1 x 10^-6 mbar in a clean system after pre-pumping with dry nitrogen gas
Rotary pump	5m³/h two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter (not included; we recommend the Edwards RV5; see Accessories)
Turbomolecular pump	Internally-mounted, 70l/s air-cooled turbomolecular pump
Vacuum measurement	Wide range gauge
Sputter vacuum range	Between 5x10^-3 and 1x10^-1 mbar for gold targets
Gases	Argon sputtering process gas, 99.999% (V S and V ES versions); Nitrogen venting gas (optional)
Electrical supply	90-250V ~ 50/60 Hz 1400 VA including RV3 rotary pump power. 110/240V voltage selectable
Power factor correction	Complies with the current legislation (CE Certification) and ensures efficient use of power which means reduced running costs